- Available
in High Thruput configuration with Multi-Reactors,
Load locks
-
PECVD
Systems are equipped with self cleaning
- Integrated
Substrate handling Robotics
- Excellent
uniformity and film properties
- High
Deposition / Etch rates
- Interchangeable
process modules
|
- Flat
Panel Display: SiO2, SiNx, H-a-Si, n+a-Si
- Semiconductor
- Solar
cells: SiNx
|