HomeContactProductsServices

PRODUCTS

 

Plasma Enhanced CVD / RIE / Plasma Strip Products

Large Area Substrates:

400 mm x 400 mm Vertical In-Line Systems

600 mm X 600 mm Vertical In-Line System

400 mm x 400 mm Cluster Systems

 

                     

 

  Productivity options:

 Applications:

  • Available in High Thruput configuration with Multi-Reactors, Load locks
  • PECVD Systems are equipped with self cleaning
  • Integrated Substrate handling Robotics
  • Excellent uniformity and film properties
  • High Deposition / Etch rates
  • Interchangeable process modules
  • Flat Panel Display: SiO2, SiNx, H-a-Si, n+a-Si
  • Semiconductor
  • Solar cells: SiNx

FOR MORE INFORMATION ON CVD/RIE/STRIP PRODUCTS AND OTHER PRODUCTS

CONTACT SALES.

Copyright(c) 2012 Kurdex Corporation. All rights reserved.