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PRODUCTS

 

Sputtering (PVD) Products

Vertical In-Line Systems

V-5000:1700 mm X 1000 mm

V-4000: 600 mm X 750 mm

V-3000: 400 mm X 500 mm

Cluster Systems

KCX: 400 mm x 400 mm

Horizontal In-Line Systems

HE-100/30: 760 mm X 760 mm

HE-100/16: 500 mm X 600 mm

HE-100/8: 210 mm X 210 mm

 

 

 

Vertical Rotary  Batch Systems

BC-2: 200 mm X 300 mm

 

Multi Layer - Optical Coating

 

 

 

  Materials Research

MRS-3: up to 8"

    Multi Source, Co-sputter, 2" cathodes, Accelerated data generation:>120 points per run

 Features and Options

Applications

  • DC, RF, Pulsed DC (Reactive), AC
  • High Volume Production - up to 60/hour Large size, 1800/hour Small Substrates
  • Pilot Production - and  R&D
  • High Target Utilization
  • Low Cost of Ownership
  • Integrated Cassette to Cassette Robotics
  • Excellent Uniformity and film properties
  • Pre-Clean options: Heat and Plasma Etch
  • Flat Panel Display: TFT, LCD, OLED, EL
  • Cr - Masks, Black Cr, Color filters
  • Flat TV: PDP
  • Solar Cell
  • HDI
  • Passive Components, Res/Cap
  • Semiconductor
  • Glass Coating - AR
  • Plastic Coating - AR
  • Optical Coating
  • Storage Media: Hard Disc, DVD RW, CD R

FOR MORE INFORMATION ON SPUTTERING PRODUCTS AND OTHER PRODUCTS

CONTACT SALES.

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