Sputter

PRODUCTS

Sputtering (PVD) Products

Vertical In-Line Systems

V-5000:1700 mm X 1000 mm

V-4000: 600 mm X 750 mm

V-3000: 400 mm X 500 mm

Cluster Systems

KCX: 400 mm x 400 mm

Horizontal In-Line Systems

HE-100/30: 760 mm X 760 mm

HE-100/16: 500 mm X 600 mm

HE-100/8: 210 mm X 210 mm

Vertical Rotary Batch Systems

BC-2: 200 mm X 300 mm

Multi Layer - Optical Coating

Materials Research

MRS-3: up to 8"

Multi Source, Co-sputter, 2" cathodes, Accelerated data generation:>120 points per run

Features and Options	Applications
DC, RF, Pulsed DC (Reactive), AC High Volume Production - up to 60/hour Large size, 1800/hour Small Substrates Pilot Production - and R&D High Target Utilization Low Cost of Ownership Integrated Cassette to Cassette Robotics Excellent Uniformity and film properties Pre-Clean options: Heat and Plasma Etch	Flat Panel Display: TFT, LCD, OLED, EL Cr - Masks, Black Cr, Color filters Flat TV: PDP Solar Cell HDI Passive Components, Res/Cap Semiconductor Glass Coating - AR Plastic Coating - AR Optical Coating Storage Media: Hard Disc, DVD RW, CD R

FOR MORE INFORMATION ON SPUTTERING PRODUCTS AND OTHER PRODUCTS