- DC,
RF, Pulsed DC (Reactive), AC
- High
Volume Production - up to 60/hour Large size, 1800/hour
Small Substrates
- Pilot
Production - and R&D
- High
Target Utilization
- Low
Cost of Ownership
- Integrated
Cassette to Cassette Robotics
- Excellent
Uniformity and film properties
-
Pre-Clean options:
Heat and Plasma Etch
|
- Flat
Panel Display: TFT, LCD,
OLED, EL
- Cr
- Masks, Black Cr, Color
filters
- Flat
TV: PDP
- Solar
Cell
- HDI
- Passive
Components, Res/Cap
- Semiconductor
- Glass
Coating - AR
- Plastic
Coating - AR
- Optical
Coating
- Storage
Media: Hard Disc, DVD RW,
CD R
|