| 
                            
                                 Thermal 
                                or E-beam, Metals, Semiconductors, Insulators, 
                                OrganicsMulti 
                                Source /  Single SourceMulti 
                                Well /  Single wellAuto 
                                Source Refill for continuous operationInternal 
                                Mask Change and Aligner Glove 
                                Box interface where applicableSingle 
                                or Dual Load Lock for High ThruputIntegrated 
                                Cassette to Cassette AutomationExcellent 
                                film uniformity and film properties | 
                            
                                 Flat 
                                Panel Display: OLED, ELOptical: 
                                Fiber-Optics, FiltersFlexible 
                                DisplayEncapsulationDielectrics |