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PRODUCTS

 

Evaporation Products

Horizontal In-line Evaporation systems:

    HE-100 400 mm X 400 mm

    HE-10-OLED 355 mm X 355  mm

Cluster Evaporation systems:

    HE-10C OLED 350 mm X 350 mm

    Mask Changer

     

 Productivity options

Applications

  • Thermal or E-beam, Metals, Semiconductors, Insulators, Organics
  • Multi Source / Single Source
  • Multi Well / Single well
  • Auto Source Refill for continuous operation
  • Internal Mask Change and Aligner 
  • Glove Box interface where applicable
  • Single or Dual Load Lock for High Thruput
  • Integrated Cassette to Cassette Automation
  • Excellent film uniformity and film properties
  • Flat Panel Display: OLED, EL
  • Optical: Fiber-Optics, Filters
  • Flexible Display
  • Encapsulation
  • Dielectrics

FOR MORE INFORMATION ON EVAPORATION PRODUCTS AND OTHER PRODUCTS

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