- Thermal
or E-beam, Metals, Semiconductors, Insulators,
Organics
- Multi
Source / Single Source
- Multi
Well / Single well
- Auto
Source Refill for continuous operation
- Internal
Mask Change and Aligner
- Glove
Box interface where applicable
- Single
or Dual Load Lock for High Thruput
- Integrated
Cassette to Cassette Automation
- Excellent
film uniformity and film properties
|
- Flat
Panel Display: OLED, EL
- Optical:
Fiber-Optics, Filters
- Flexible
Display
- Encapsulation
- Dielectrics
|